Novel reactor concept for multiwafer growth of III-V semiconductors

被引：0
|
作者：
Beccard, R. [1 ]
Protzmann, H. [1 ]
Schmitz, D. [1 ]
Strauch, G. [1 ]
Heuken, M. [1 ]
Juergensen, H. [1 ]
机构：
[1] AIXTRON AG, Kackertstr. 15-17, D-52072 Aachen, Germany
来源：
Journal of Crystal Growth | 1999年 / 198-199卷 / pt 2期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1049 / 1055
相关论文
共 50 条
  • [21] Improved epitaxial growth of TbAs film on III-V semiconductors
    Wang, Yuejing
    Bork, James
    Law, Stephanie
    Zide, Joshua M. O.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2020, 38 (03):
  • [22] Growth of III-V semiconductors and lasers on silicon substrates by MOCVD
    Shi, Bei
    Lau, Kei May
    FUTURE DIRECTIONS IN SILICON PHOTONICS, 2019, 101 : 229 - 282
  • [23] Epitaxial nucleation and growth mechanism of III-V compound semiconductors
    Gopalakrishnan, N.
    Qhalid Fareed, R.S.
    Dhanasekaran, R.
    Journal of the Indian Institute of Science, 1996, 76 (02): : 223 - 233
  • [24] Epitaxial Growth of Metallic Compounds on III-V Semiconductors.
    Guivarc'h, A.
    Guerin, R.
    Poudoulec, A.
    Caulet, J.
    Guenais, B.
    Ballini, Y.
    Dupas, G.
    Ropars, G.
    Regreny, A.
    Le Vide, les couches minces, 1988, 43 (241): : 187 - 189
  • [25] Heteroepitaxial growth of III-V compound semiconductors for optoelectronic devices
    Egawa, T
    Ishikawa, H
    Jimbo, T
    Umeno, M
    BULLETIN OF MATERIALS SCIENCE, 1999, 22 (03) : 363 - 367
  • [26] INCORPORATION OF HYDROGEN INTO III-V SEMICONDUCTORS DURING GROWTH AND THE PROCESSING
    PEARTON, SJ
    ABERNATHY, CR
    HOBSON, WS
    REN, F
    FULLOWAN, TR
    LOPATA, J
    CHAKRABARTI, UK
    KOZUCH, DM
    STAVOLA, M
    INSTITUTE OF PHYSICS CONFERENCE SERIES, 1992, (120): : 195 - 198
  • [27] Heteroepitaxial growth of III-V compound semiconductors for optoelectronic devices
    Res. Ctr. of Micro-Structure Devices, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan
    不详
    Bull Mater Sci, 3 (363-367):
  • [28] BAND-GAP NARROWING IN NOVEL III-V SEMICONDUCTORS
    JAIN, SC
    MCGREGOR, JM
    ROULSTON, DJ
    JOURNAL OF APPLIED PHYSICS, 1990, 68 (07) : 3747 - 3749
  • [29] A POLISHING ETCHANT FOR III-V SEMICONDUCTORS
    FULLER, CS
    ALLISON, HW
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (09) : 880 - 880
  • [30] PASSIVATION OF III-V COMPOUND SEMICONDUCTORS
    VIKTOROVITCH, P
    REVUE DE PHYSIQUE APPLIQUEE, 1990, 25 (09): : 895 - 914
12345