Some effects of phosphorus doping in SiC:H films prepared using ECR-CVD

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Nanyang Technological Univ, Singapore, Singapore [1 ]
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Mater Sci Eng B Solid State Adv Technol | / 3卷 / 215-220期
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Number:; -; Acronym:; Sponsor: University of Cambridge; NTU; Sponsor: Nanyang Technological University;
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