Grazing-angle RBS and channelling analysis of BF2+ implantation damage in silicon

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[1] Lin, Chenglu
[2] Zhou, Zuyou
[3] Hemment, P.L.F.
[4] Li, Xiaoqin
[5] Yang, Genqin
[6] Zhu, Wenhua
[7] Zou, Shichang
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Lin, Chenglu | 1600年 / Publ by Akademie-Verlag Berlin, Berlin, Germany卷 / 142期
关键词：
Boron fluoride - Channelling analysis - Grazing angle Rutherford backscattering;
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