Effect of deposition conditions on the properties of TiN thin films prepared by filtered cathodic vacuum-arc technique

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作者：
Tay, B.K. [1 ]
Shi, X. [1 ]
Yang, H.S. [1 ]
Tan, H.S. [1 ]
Chua, Daniel [1 ]
Teo, S.Y. [1 ]
机构：
[1] Nanyang Technological Univ, Singapore, Singapore
来源：
Surface and Coatings Technology | 1999年 / 111卷 / 2-3期
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页码：229 / 233
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