Research on system error calibration algorithm of point diffraction interferometer

被引：1
|
作者：
Jiang, Zhangde [1 ,2 ]
Gao, Fen [1 ,2 ]
Li, Bing [1 ,2 ]
机构：
[1] State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China
[2] School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China
来源：
Jixie Gongcheng Xuebao/Journal of Mechanical Engineering | 2013年 / 49卷 / 16期
关键词：
D O I：
10.3901/JME.2013.16.048
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：48 / 56
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