Research on system error calibration algorithm of point diffraction interferometer

被引：1
|
作者：
Jiang, Zhangde [1 ,2 ]
Gao, Fen [1 ,2 ]
Li, Bing [1 ,2 ]
机构：
[1] State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China
[2] School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China
来源：
Jixie Gongcheng Xuebao/Journal of Mechanical Engineering | 2013年 / 49卷 / 16期
关键词：
D O I：
10.3901/JME.2013.16.048
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：48 / 56
相关论文
共 50 条
  • [21] Error Analysis of the Geometric Self-calibration of the Grating Interferometer System for the Wafer Stage
    Ye, Weinan
    Wang, Leijie
    Zhang, Ming
    Zhu, Yu
    Hu, Jinchun
    Li, Xin
    Hu, Chuxiong
    2019 2ND WORLD CONFERENCE ON MECHANICAL ENGINEERING AND INTELLIGENT MANUFACTURING (WCMEIM 2019), 2019, : 765 - 769
  • [22] POINT-DIFFRACTION HOLOGRAPHIC INTERFEROMETER.
    Zhou, Wanzhi
    Lu, Zhenwu
    1986, (06):
  • [23] Dual-domain point diffraction interferometer
    Naulleau, PP
    Goldberg, KA
    APPLIED OPTICS, 1999, 38 (16) : 3523 - 3533
  • [24] Double-pass point diffraction interferometer
    Kihm, Hagyong
    Lee, Yun-Woo
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2010, 21 (10)
  • [25] Point diffraction interferometer with a liquid crystal monopixel
    Ramirez, Claudio
    Oton, Eva
    Iemmi, Claudio
    Moreno, Ignacio
    Bennis, Noureddine
    Manuel Oton, Jose
    Campos, Juan
    OPTICS EXPRESS, 2013, 21 (07): : 8116 - 8125
  • [26] Point-diffraction interferometer for radio telescopes
    Okumura, Taishi
    Imada, Hiroaki
    Nagai, Makoto
    Nitta, Tom
    Nakai, Naomasa
    Kuno, Nario
    GROUND-BASED AND AIRBORNE TELESCOPES VI, 2016, 9906
  • [27] Phase-shifting point diffraction interferometer
    Medecki, H
    Tejnil, E
    Goldberg, KA
    Bokor, J
    OPTICS LETTERS, 1996, 21 (19) : 1526 - 1528
  • [28] Polarized Point Diffraction Interferometer for Fringe Stabilization
    Kihm, Hagyong
    Lee, Yun-Woo
    INTERFEROMETRY XV: TECHNIQUES AND ANALYSIS, 2010, 7790
  • [29] Phase-shifting point diffraction interferometer
    Medecki, H.
    Tejnil, E.
    Goldberg, K.A.
    Bokor, J.
    1996, Optical Soc of America, Washington, DC, United States (21)
  • [30] Development of point diffraction interferometer by a dimension-reduction-based phase-shifting algorithm
    Feng, Leijie
    Du, Hubing
    Liu, Chang
    Han, Jinlu
    Zhang, Gaopeng
    Wang, Feng
    Zhao, Zixin
    Gao, Fen
    APPLIED OPTICS, 2021, 60 (30) : 9440 - 9446
12345