Torsion fatigue testing of polycrystalline silicon cross-microbridge structures

被引：0
|
作者：
Hung, Jeng-Nan [1 ]
Hocheng, Hong [1 ]
Sato, Kazuo [2 ]
机构：
[1] Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan
[2] Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan
来源：
Japanese Journal of Applied Physics | 2011年 / 50卷 / 6 PART 2期
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I：
06GM07
中图分类号：
学科分类号：
摘要：
Fatigue testing - Polycrystalline materials - Polysilicon
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