Torsion fatigue testing of polycrystalline silicon cross-microbridge structures

被引：0
|
作者：
Hung, Jeng-Nan [1 ]
Hocheng, Hong [1 ]
Sato, Kazuo [2 ]
机构：
[1] Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan
[2] Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan
来源：
Japanese Journal of Applied Physics | 2011年 / 50卷 / 6 PART 2期
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I：
06GM07
中图分类号：
学科分类号：
摘要：
Fatigue testing - Polycrystalline materials - Polysilicon
引用
收藏
相关论文
共 50 条
  • [31] Stress Monitoring of Post-processed MEMS Silicon Microbridge Structures Using Raman Spectroscopy
    Starman, L.
    Coutu, R., Jr.
    EXPERIMENTAL MECHANICS, 2012, 52 (09) : 1341 - 1353
  • [32] Surface engineering of polycrystalline silicon microelectromechanical systems for fatigue resistance
    Muhlstein, CL
    Ashurst, WR
    Stach, EA
    Maboudian, R
    Ritchie, RO
    BIOMEMS AND BIONANOTECHNOLOGY, 2002, 729 : 41 - 46
  • [33] EQUIPMENT FOR LOW-CYCLE TORSION FATIGUE TESTING OF SPECIMENS
    GORDIENKO, AV
    KUTSEVOLOV, SM
    MALICH, NG
    SEMENENKO, AV
    BELODEDENKO, SV
    INDUSTRIAL LABORATORY, 1985, 51 (12): : 1173 - 1175
  • [34] A MACHINE FOR TESTING METALS FOR FATIGUE IN BENDING COMBINED WITH STATIC TORSION
    NICHIPOR.SN
    INDUSTRIAL LABORATORY, 1965, 30 (11): : 1736 - &
  • [35] BAND STRUCTURES OF ALL POLYCRYSTALLINE FORMS OF SILICON DIOXIDE
    LI, YP
    CHING, WY
    PHYSICAL REVIEW B, 1985, 31 (04): : 2172 - 2179
  • [36] STRESS MEASUREMENT BY MICRORAMAN SPECTROSCOPY OF POLYCRYSTALLINE SILICON STRUCTURES
    BENRAKKAD, MS
    BENITEZ, MA
    ESTEVE, J
    LOPEZVILLEGAS, JM
    SAMITIER, J
    MORANTE, JR
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1995, 5 (02) : 132 - 135
  • [37] Modeling of Probabilistic Failure of Polycrystalline Silicon MEMS Structures
    Le, Jia-Liang
    Ballarini, Roberto
    Zhu, Zhiren
    Journal of the American Ceramic Society, 2015,
  • [38] Thermometry of polycrystalline silicon structures using Raman spectrscopy
    Abel, Mark R.
    Graham, Samuel
    Advances in Electronic Packaging 2005, Pts A-C, 2005, : 1695 - 1702
  • [39] Modeling of Probabilistic Failure of Polycrystalline Silicon MEMS Structures
    Le, Jia-Liang
    Ballarini, Roberto
    Zhu, Zhiren
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2015, 98 (06) : 1685 - 1697
  • [40] FUNDAMENTALS OF MEMORY SWITCHING IN VERTICAL POLYCRYSTALLINE SILICON STRUCTURES
    MALHOTRA, V
    MAHAN, JE
    ELLSWORTH, DL
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (11) : 2441 - 2449
12345