Meniscus coating and thickness measurement of photoresist

被引：0
|
作者：
Lin, Jiping [1 ,2 ]
Liang, Juxi [1 ]
Liu, Zhengkun [1 ]
Wang, Qingbo [1 ]
Bao, Jianguang [1 ]
Hong, Yilin [1 ]
Fu, Shaojun [1 ]
机构：
[1] National Synchrotron Radiation Lab, University of Science and Technology of China, Hefei, China
[2] School of Physics and Material Science, Anhui University, Hefei, China
来源：
Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams | 2014年 / 26卷 / 10期
关键词：
Light interference - Photoresists - Substrates - Coatings - Fiber optic sensors - Thickness gages;
D O I：
10.11884/HPLPB201426.101017
中图分类号：
学科分类号：
摘要：
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