Meniscus coating and thickness measurement of photoresist

被引：0
|
作者：
Lin, Jiping [1 ,2 ]
Liang, Juxi [1 ]
Liu, Zhengkun [1 ]
Wang, Qingbo [1 ]
Bao, Jianguang [1 ]
Hong, Yilin [1 ]
Fu, Shaojun [1 ]
机构：
[1] National Synchrotron Radiation Lab, University of Science and Technology of China, Hefei, China
[2] School of Physics and Material Science, Anhui University, Hefei, China
来源：
Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams | 2014年 / 26卷 / 10期
关键词：
Light interference - Photoresists - Substrates - Coatings - Fiber optic sensors - Thickness gages;
D O I：
10.11884/HPLPB201426.101017
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] ENSURING UNIFORMITY OF COATING THICKNESS MEASUREMENT
    BABADZHANOV, LS
    MEASUREMENT TECHNIQUES USSR, 1991, 34 (11): : 1103 - 1106
  • [22] MEASUREMENT OF FIBER COATING THICKNESS VARIATION
    Hay, Randall S.
    Fair, Geoff
    Mogilevsky, Pavel
    Boakye, Emmanuel
    MECHANICAL PROPERTIES AND PERFORMANCE OF ENGINEERING CERAMICS AND COMPOSITES, 2005, 26 (02): : 11 - 18
  • [23] Measurement of anticorrosive coating thickness in pipe
    Qu, GY
    Sui, XL
    Wan, QY
    PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 1, 2002, : 766 - 769
  • [24] ERROR IN COULOMETRIC COATING THICKNESS MEASUREMENT
    KAPITONOV, AA
    DAVYDOV, NI
    MEASUREMENT TECHNIQUES USSR, 1984, 27 (07): : 609 - 610
  • [25] RESISTIVITY MEASUREMENT FOR EVALUATION OF COATING THICKNESS
    LEWIS, A
    BUSH, D
    MATERIALS EVALUATION, 1991, 49 (02) : 132 - 135
  • [26] Common coating thickness measurement methods
    Finsh. Today, 2007, 11 (71-73):
  • [27] METALLIC COATING THICKNESS MEASUREMENT.
    Anon
    IBM technical disclosure bulletin, 1986, 28 (10): : 4270 - 4272
  • [28] FAST MEASUREMENT OF THE ZINC COATING THICKNESS ON SHEETS
    RYBAKOV, VS
    POLUKHIN, VI
    MASENTSOV, AA
    INDUSTRIAL LABORATORY, 1991, 57 (06): : 666 - 667
  • [29] USE OF STANDARD SPECIMENS IN COATING THICKNESS MEASUREMENT
    KAZANTSEV, VV
    ELTYSHEV, VP
    MEASUREMENT TECHNIQUES USSR, 1981, 24 (07): : 591 - 592
  • [30] In-process optical measurement of coating thickness
    Barton, JS
    De Freitas, JM
    Gregory, G
    Jennings, P
    Jones, AC
    Jones, JDC
    Kilpatrick, JM
    Plows, FL
    Spencer, P
    MEASUREMENT & CONTROL, 2000, 33 (02): : U1 - U4
12345