Meniscus coating and thickness measurement of photoresist

被引：0

作者：

Lin, Jiping ^{[1
,2
]}

Liang, Juxi ^{[1
]}

Liu, Zhengkun ^{[1
]}

Wang, Qingbo ^{[1
]}

Bao, Jianguang ^{[1
]}

Hong, Yilin ^{[1
]}

Fu, Shaojun ^{[1
]}

机构：

[1] National Synchrotron Radiation Lab, University of Science and Technology of China, Hefei, China

[2] School of Physics and Material Science, Anhui University, Hefei, China

来源：

Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams | 2014年 / 26卷 / 10期

关键词：

Light interference - Photoresists - Substrates - Coatings - Fiber optic sensors - Thickness gages;

D O I：

10.11884/HPLPB201426.101017

中图分类号：

学科分类号：

摘要：

引用

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