Plasma parameters investigation of the RF inductive plasma source with diameter 46 cm. Part II. Plasma parameters numerical simulation of the inductive and hybrid RF discharges

被引：0
|
作者：
机构：
[1] Aleksandrov, A.F.
[2] Vavilin, K.V.
[3] Kralkina, E.A.
[4] Neklyudova, P.A.
[5] Pavlov, V.B.
来源：
| 1600年 / Federal Informational-Analytical Center of the Defense Industry卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
下载
收藏
相关论文
共 50 条
  • [31] Self-consistent model of an RF inductive plasma source located in an external magnetic field
    Aleksandrov, AF
    Bugrov, GE
    Kerimova, IF
    Kondranin, SG
    Kralkina, EA
    Pavlov, VB
    Plaksin, VY
    Rukhadze, AA
    Vavilin, KV
    JOURNAL OF RUSSIAN LASER RESEARCH, 2003, 24 (04) : 301 - 321
  • [32] Electromagnetic, complex image model of a large area RF resonant antenna as inductive plasma source
    Guittienne, Ph
    Jacquier, R.
    Howling, A. A.
    Furno, I.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2017, 26 (03):
  • [33] Self-Consistent Model of an RF Inductive Plasma Source Located in an External Magnetic Field
    A. F. Aleksandrov
    G. E. Bugrov
    I. F. Kerimova
    S. G. Kondranin
    E. A. Kralkina
    V. B. Pavlov
    V. Yu. Plaksin
    A. A. Rukhadze
    K. V. Vavilin
    Journal of Russian Laser Research, 2003, 24 : 301 - 321
  • [34] Evolution of plasma parameters in a He-N2/Ar magnetic pole enhanced inductive plasma source
    Younus, Maria
    Rehman, N. U.
    Shafiq, M.
    Zakaullah, M.
    Abrar, M.
    PHYSICS OF PLASMAS, 2016, 23 (02)
  • [35] Evolution of plasma parameters in an Ar-N2/He inductive plasma source with magnetic pole enhancement
    Maria YOUNUS
    N U REHMAN
    M SHAFIQ
    M NAEEM
    M ZAKA-UL-ISLAM
    M ZAKAULLAH
    Plasma Science and Technology, 2017, 19 (02) : 38 - 46
  • [36] Evolution of plasma parameters in an Ar-N2/He inductive plasma source with magnetic pole enhancement
    Younus, Maria
    Rehman, N. U.
    Shafiq, M.
    Naeem, M.
    Zaka-Ul-Islam, M.
    Zakaullah, M.
    PLASMA SCIENCE & TECHNOLOGY, 2017, 19 (02)
  • [37] Investigation of RF Originated 'Cold' Plasma Parameters in Capacitive Coupled Reactor
    Sargsyan, S. T.
    JOURNAL OF CONTEMPORARY PHYSICS-ARMENIAN ACADEMY OF SCIENCES, 2019, 54 (01) : 105 - 109
  • [38] Investigation of RF Originated ‘Cold’ Plasma Parameters in Capacitive Coupled Reactor
    S. T. Sargsyan
    Journal of Contemporary Physics (Armenian Academy of Sciences), 2019, 54 : 105 - 109
  • [39] Effect of an External Magnetic Field on the Absorption Efficiency of the RF Power in a Spatially Bounded Inductive Plasma Source
    Nekliudova, P. A.
    Kralkina, E. A.
    Vavilin, K. V.
    Zadiriyev, I. I.
    Nikonov, A. M.
    PLASMA PHYSICS REPORTS, 2018, 44 (09) : 878 - 881
  • [40] Effect of an External Magnetic Field on the Absorption Efficiency of the RF Power in a Spatially Bounded Inductive Plasma Source
    P. A. Nekliudova
    E. A. Kralkina
    K. V. Vavilin
    I. I. Zadiriyev
    A. M. Nikonov
    Plasma Physics Reports, 2018, 44 : 878 - 881
12345