Self-Consistent Model of an RF Inductive Plasma Source Located in an External Magnetic Field

被引:0
|
作者
A. F. Aleksandrov
G. E. Bugrov
I. F. Kerimova
S. G. Kondranin
E. A. Kralkina
V. B. Pavlov
V. Yu. Plaksin
A. A. Rukhadze
K. V. Vavilin
机构
[1] M. V. Lomonosov Moscow State University Vorob'evy Gory,Physics Department
[2] Plasma Technology Co.,Institute of General Physics
[3] Ltd.,undefined
[4] Russian Academy of Sciences Ul. Vavilova 38,undefined
来源
关键词
IR inductive plasma source; plasma resistance; Trivelpiece–Gould wave; helicon; external magnetic field;
D O I
暂无
中图分类号
学科分类号
摘要
A theory for calculating plasma resistance and the RF power absorbed in an inductive plasma source is developed. Conditions are determined under which most of the power is absorbed by the plasma. It is shown that these conditions correspond to excitation of spatial waves (oblique Langmuir wave and helicon). A simple self-consistent model of the plasma source is proposed, which explains the specific features of the plasma sources experimentally observed.
引用
收藏
页码:301 / 321
页数:20
相关论文
共 50 条
  • [1] Self-consistent model of an RF inductive plasma source located in an external magnetic field
    Aleksandrov, AF
    Bugrov, GE
    Kerimova, IF
    Kondranin, SG
    Kralkina, EA
    Pavlov, VB
    Plaksin, VY
    Rukhadze, AA
    Vavilin, KV
    JOURNAL OF RUSSIAN LASER RESEARCH, 2003, 24 (04) : 301 - 321
  • [2] Self-consistent model of an inductive RF plasma source in an external magnetic field
    A. F. Aleksandrov
    G. É. Bugrov
    K. V. Vavilin
    I. F. Kerimova
    S. G. Kondranin
    E. A. Kral'kina
    V. B. Pavlov
    V. Yu. Plaksin
    A. A. Rukhadze
    Plasma Physics Reports, 2004, 30 : 398 - 412
  • [3] Self-consistent model of an inductive RF plasma source in an external magnetic field
    Aleksandrov, AF
    Bugrov, GÉ
    Vavilin, KV
    Kerimova, IF
    Kondranin, SG
    Kral'kina, EA
    Pavlov, VB
    Plaksin, VY
    Rukhadze, AA
    PLASMA PHYSICS REPORTS, 2004, 30 (05) : 398 - 412
  • [4] PLASMA IN A SELF-CONSISTENT MAGNETIC FIELD
    KOMAROV, NN
    FADEEV, VM
    SOVIET PHYSICS JETP-USSR, 1962, 14 (02): : 378 - 381
  • [5] Axial Dependence of the Longitudinal RF Magnetic Field and Plasma Parameters in an Inductive Plasma Source with an External Magnetic Field
    A. M. Nikonov
    K. V. Vavilin
    I. I. Zadiriev
    E. A. Kralkina
    Plasma Physics Reports, 2022, 48 : 1189 - 1198
  • [6] Axial Dependence of the Longitudinal RF Magnetic Field and Plasma Parameters in an Inductive Plasma Source with an External Magnetic Field
    Nikonov, A. M.
    Vavilin, K. V.
    Zadiriev, I. I.
    Kralkina, E. A.
    PLASMA PHYSICS REPORTS, 2022, 48 (11) : 1189 - 1198
  • [7] SELF-CONSISTENT MODEL OF THE RF PLASMA PRODUCTION IN STELLARATOR
    Moiseenko, V. E.
    Stadnik, Yu. S.
    Lyssoivan, A. I.
    Dreval, M. B.
    PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2010, (06): : 21 - 23
  • [8] Self-consistent EMHD penetration of a magnetic field into a plasma
    Chukbar, KV
    Ivanov, AA
    Smirnov, VV
    JOURNAL OF PLASMA PHYSICS, 1998, 60 : 761 - 773
  • [9] SELF-CONSISTENT MAGNETIC FIELD AND INTEGRALS OF PLASMA MOTION
    LACINA, J
    NUCLEAR FUSION, 1966, 6 (04) : 268 - &
  • [10] RF power absorption by plasma of low pressure low power inductive discharge located in the external magnetic field
    Kralkina, E. A.
    Rukhadze, A. A.
    Nekliudova, P. A.
    Pavlov, V. B.
    Petrov, A. K.
    Vavilin, K. V.
    AIP ADVANCES, 2018, 8 (03):