Self-Consistent Model of an RF Inductive Plasma Source Located in an External Magnetic Field

被引：0
|
作者：
A. F. Aleksandrov
G. E. Bugrov
I. F. Kerimova
S. G. Kondranin
E. A. Kralkina
V. B. Pavlov
V. Yu. Plaksin
A. A. Rukhadze
K. V. Vavilin
机构：
[1] M. V. Lomonosov Moscow State University Vorob'evy Gory,Physics Department
[2] Plasma Technology Co.,Institute of General Physics
[3] Ltd.,undefined
[4] Russian Academy of Sciences Ul. Vavilova 38,undefined
来源：
Journal of Russian Laser Research | 2003年 / 24卷
关键词：
IR inductive plasma source; plasma resistance; Trivelpiece–Gould wave; helicon; external magnetic field;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A theory for calculating plasma resistance and the RF power absorbed in an inductive plasma source is developed. Conditions are determined under which most of the power is absorbed by the plasma. It is shown that these conditions correspond to excitation of spatial waves (oblique Langmuir wave and helicon). A simple self-consistent model of the plasma source is proposed, which explains the specific features of the plasma sources experimentally observed.
引用
收藏
页码：301 / 321
页数：20
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