Evaluation of absolute flux of vacuum ultraviolet photons in an electron cyclotron resonance hydrogen plasma: Comparison with ion flux

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[1] Zaima, Kazunori
[2] Kurihara, Kazuaki
[3] Sasaki, Koichi
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Zaima, K. | / Japan Society of Applied Physics卷 / 51期
关键词：
Absolute intensity - Fabrication process - Plasma induced damage - Principal quantum numbers - Spectroscopic systems - Ultra large scale integrated circuits - Vacuum ultraviolets - Wavelength ranges;
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