共 50 条
- [22] Advancements in EUV photoresists for high-NA lithography INTERNATIONAL CONFERENCE ON EXTREME ULTRAVIOLET LITHOGRAPHY 2023, 2023, 12750
- [23] Metalenses with High-NA, Enhanced Resolution and Apodization 2017 19TH INTERNATIONAL CONFERENCE ON TRANSPARENT OPTICAL NETWORKS (ICTON), 2017,
- [24] High-NA EUV lithography - pushing the limits 35TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE (EMLC 2019), 2019, 11177
- [25] The SEMATECH high-NA actinic reticle review project (SHARP) EUV mask-imaging microscope PHOTOMASK TECHNOLOGY 2013, 2013, 8880
- [28] High-NA EUV imaging: challenges and outlook 35TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE (EMLC 2019), 2019, 11177
- [30] Characterizing the demons in high-NA phaseshifting masks 24TH ANNUAL BACUS SYMPOSIUM ON PHOTOMASK TECHNOLOGY, PT 1 AND 2, 2004, 5567 : 445 - 455