Oxygen pressure and hydrophilicity of TiO2 films grown by reactive magnetron sputtering

被引：0
|
作者：
Ba, Dechun [1 ]
Chang, Xuesen [1 ]
Wen, Lishi [2 ]
Liu, Kun [1 ]
机构：
[1] Vacuum and Fluid Engineering Research Center, Northeastern University, Shenyang 110004, China
[2] Institute of Metal Material, Chinese Acad. of Sci., Shenyang 110015, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2007年 / 27卷 / 02期
关键词：
Vacuum;
D O I：
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摘要：
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页码：155 / 158
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