Ultra precise positioning of a stage driven by pneumatic bellows

被引：0
|
作者：
Fujita, Toshinori [1 ]
Sakai, Kazutoshi [2 ]
Takagi, Yusuke [3 ]
Kawashima, Kenji [4 ]
Kagawa, Toshiharu [4 ]
机构：
[1] Department of Mechanical Engineering, Tokyo Denki University, 2-2 Kanda-Nishiki-cho, Chiyoda-ku, Tokyo 101-8457, Japan
[2] Corporate Planning and Development, Sumitomo Heavy Industries, Ltd, 1-1 Osaki 2-chome, Shinagawa-ku, Tokyo 141-6025, Japan
[3] Yamaha Motor Co.,Ltd, 882 Soude, Naka-ku, Hamamatsu, Shizuoka 435-0054, Japan
[4] Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 R2-45 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
来源：
International Journal of Automation Technology | 2011年 / 5卷 / 04期
关键词：
D O I：
10.20965/ijat.2011.p0508
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：508 / 515
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