Development of an ultara-precise positioning stage engaged with gratings

被引：0
|
作者：
Wada, T [1 ]
Honda, S [1 ]
机构：
[1] Tokyo Metropolitan Inst Technol, Tokyo, Japan
来源：
PROCEEDINGS OF THE FOURTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1999年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：228 / 231
页数：4
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