Development of an ultara-precise positioning stage engaged with gratings

被引：0
|
作者：
Wada, T [1 ]
Honda, S [1 ]
机构：
[1] Tokyo Metropolitan Inst Technol, Tokyo, Japan
来源：
PROCEEDINGS OF THE FOURTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1999年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：228 / 231
页数：4
相关论文
共 50 条
  • [21] Development of a test rig for the precise positioning of a pedestrian dummy in driving tests
    [J]. Hahn, Stefan (stefan.hahn@h-ab.de), 2015, Inderscience Enterprises Ltd., 29, route de Pre-Bois, Case Postale 856, CH-1215 Geneva 15, CH-1215, Switzerland (08)
  • [22] Development of Satellite Based Positioning and Navigation Facilities for Precise ITS Applications
    Meng, X.
    Yang, L.
    Aponte, J.
    Hill, C.
    Moore, T.
    Dodson, A. H.
    [J]. PROCEEDINGS OF THE 11TH INTERNATIONAL IEEE CONFERENCE ON INTELLIGENT TRANSPORTATION SYSTEMS, 2008, : 962 - 967
  • [23] Integrated Development of a Topology-Optimized Compliant Mechanism for Precise Positioning
    Hu, Yaoyuan
    Ju, Bingfeng
    Zhu, Wule
    [J]. ACTUATORS, 2022, 11 (07)
  • [24] Development of shear-mode piezoelectric microactuator for precise head positioning
    Koganezawa, S
    Hara, T
    [J]. FUJITSU SCIENTIFIC & TECHNICAL JOURNAL, 2001, 37 (02): : 212 - 219
  • [25] Development of shear-mode piezoelectric microactuator for precise head positioning
    [J]. 2001, Fujitsu Ltd (37):
  • [26] A practical approach based on stream of variation for positioning accuracy in precise linear motion stage
    Tang, Hao
    Duan, Ji-an
    Zheng, Yu
    Li, Baibing
    [J]. Proceedings of the 2016 3rd International Conference on Mechatronics and Information Technology (ICMIT), 2016, 49 : 679 - 685
  • [27] A Fast CLSM Undersampling Image Reconstruction Framework with Precise Stage Positioning for Random Measurements
    Chang, Kuang-Yao
    Liu, Yi-Lin
    Liu, Da-Wei
    Chou, Meng-Hao
    Wu, Jim-Wei
    Fu, Li-Chen
    [J]. 2017 11TH ASIAN CONTROL CONFERENCE (ASCC), 2017, : 1122 - 1127
  • [28] On the energy-optimal precise wafer stage positioning: equivalence with minimal time optimality
    Ioslovich, Ilya
    Moshenberg, Shai
    Gutman, Per-Olof
    [J]. 2015 IEEE 24TH INTERNATIONAL SYMPOSIUM ON INDUSTRIAL ELECTRONICS (ISIE), 2015, : 95 - 99
  • [29] Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory
    Wu, Jim-Wei
    Weng, Jui-Tse
    Hsu, Ting-Kuei
    Chao, Shao-An
    Chen, Bo-Hao
    [J]. 2022 INTERNATIONAL AUTOMATIC CONTROL CONFERENCE (CACS), 2022,
  • [30] Development of the Kinematic Global Positioning System Precise Point Positioning Method Using 3-Pass Filter
    Choi, Byung-Kyu
    Roh, Kyoung-Min
    Cho, Sung-Ki
    Park, Jong-Uk
    Park, Pil-Ho
    Lee, Sang-Jeong
    [J]. JOURNAL OF ASTRONOMY AND SPACE SCIENCE, 2012, 29 (03) : 269 - 274
12345