A model for precise alignment: Nanometer positioning robotic stage (NPRS)

被引：0

作者：

Haskiya, WK ^{[1
]}

Kennedy, D ^{[1
]}

机构：

[1] Dublin Inst Technol, Fac Engn, Dublin, Ireland

来源：

IROS 2003: PROCEEDINGS OF THE 2003 IEEE/RSJ INTERNATIONAL CONFERENCE ON INTELLIGENT ROBOTS AND SYSTEMS, VOLS 1-4 | 2003年

关键词：

nanometer positioning robotic stage (NPRS); piezoelectricity (smart material); novel micro actuator; micro robots;

D O I：

暂无

中图分类号：

TP24 [机器人技术];

学科分类号：

080202 ; 1405 ;

摘要：

There is a great deal of research evolved around systems to deliver precise alignment in the range of nanometer and arc the second for applications, such as positioning of samples used in surface analysis, or the alignment of chip sized components for assembly etc. These technologies feature the use of small-scale motors that rotate a relevant axis to provide a precise motion to a working stage. The problem with these technologies is there small output and the dependence on moving parts, which require maintenance.

引用

页码：2139 / 2142

页数：4

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