Nonlinear dynamics of lateral micro-resonator including viscous air damping

被引：0
|
作者：
Gao, Rong [1 ]
Wang, Xiaojing [1 ]
Wang, Min [2 ]
Yu, Maohua [1 ]
Xie, Mingchun [1 ]
机构：
[1] School of Mechanical Electronic Engineering and Automation, Shanghai University, Shanghai 200072, China
[2] No.802 Institute, Shanghai Academy of Spaceflight Technology, Shanghai 200090, China
来源：
Chinese Journal of Mechanical Engineering (English Edition) | 2007年 / 20卷 / 03期
关键词：
Microelectromechanical devices;
D O I：
10.3901/CJME.2007.03.075
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：75 / 78
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