Nonlinear dynamics of lateral micro-resonator including viscous air damping

被引：0
|
作者：
Gao, Rong [1 ]
Wang, Xiaojing [1 ]
Wang, Min [2 ]
Yu, Maohua [1 ]
Xie, Mingchun [1 ]
机构：
[1] School of Mechanical Electronic Engineering and Automation, Shanghai University, Shanghai 200072, China
[2] No.802 Institute, Shanghai Academy of Spaceflight Technology, Shanghai 200090, China
来源：
Chinese Journal of Mechanical Engineering (English Edition) | 2007年 / 20卷 / 03期
关键词：
Microelectromechanical devices;
D O I：
10.3901/CJME.2007.03.075
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：75 / 78
相关论文
共 50 条
  • [11] Viscous fluid damping in a laterally oscillating finger of a comb-drive micro-resonator based on micro-polar fluid theory
    Sahra Azma
    Ghader Rezazadeh
    Rasoul Shabani
    Elnaz Alizadeh-Haghighi
    Acta Mechanica Sinica, 2016, 32 (03) : 397 - 405
  • [12] Thermo-elastic damping in a functionally graded piezoelectric micro-resonator
    Saber Azizi
    Mohammad-Reza Ghazavi
    Ghader Rezazadeh
    Siamak Esmaeilzadeh Khadem
    International Journal of Mechanics and Materials in Design, 2015, 11 : 357 - 369
  • [13] Viscous fluid damping in a laterally oscillating finger of a comb-drive micro-resonator based on micro-polar fluid theory
    Azma, Sahra
    Rezazadeh, Ghader
    Shabani, Rasoul
    Alizadeh-Haghighi, Elnaz
    ACTA MECHANICA SINICA, 2016, 32 (03) : 397 - 405
  • [14] Viscous fluid damping in a laterally oscillating finger of a comb-drive micro-resonator based on micro-polar fluid theory
    Sahra Azma
    Ghader Rezazadeh
    Rasoul Shabani
    Elnaz Alizadeh-Haghighi
    Acta Mechanica Sinica, 2016, 32 : 397 - 405
  • [15] Thermo-elastic damping in a functionally graded piezoelectric micro-resonator
    Azizi, Saber
    Ghazavi, Mohammad-Reza
    Rezazadeh, Ghader
    Khadem, Siamak Esmaeilzadeh
    INTERNATIONAL JOURNAL OF MECHANICS AND MATERIALS IN DESIGN, 2015, 11 (04) : 357 - 369
  • [16] Nonlinear mode saturation in a U-shaped micro-resonator
    Rodrigo T. Rocha
    Mohammad I. Younis
    Scientific Reports, 12
  • [17] Nonlinear mode saturation in a U-shaped micro-resonator
    Rocha, Rodrigo T.
    Younis, Mohammad, I
    SCIENTIFIC REPORTS, 2022, 12 (01)
  • [18] Nonlinear vibration modes and energy localization in micro-resonator arrays
    Dick, A. J.
    Balachandran, B.
    Mote, C. D., Jr.
    IUTAM SYMPOSIUM ON DYNAMICS AND CONTROL OF NONLINEAR SYSTEMS WITH UNCERTAINTY, 2007, 2 : 207 - +
  • [19] On the nonlinear dynamics of a piezoelectrically tuned micro-resonator based on non-classical elasticity theories
    Nikpourian, Alireza
    Ghazavi, Mohammad Reza
    Azizi, Saber
    INTERNATIONAL JOURNAL OF MECHANICS AND MATERIALS IN DESIGN, 2018, 14 (01) : 1 - 19
  • [20] On the nonlinear dynamics of a piezoelectrically tuned micro-resonator based on non-classical elasticity theories
    Alireza Nikpourian
    Mohammad Reza Ghazavi
    Saber Azizi
    International Journal of Mechanics and Materials in Design, 2018, 14 : 1 - 19
12345