Study on uniform deposition of spherical diamond film on a large area substrate

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作者
Xiang, Bing-Kun [1 ,2 ]
Zuo, Dun-Wen [2 ]
Li, Duo-Sheng [2 ]
Lu, Hai-Quan [2 ]
Chen, Rong-Fa [2 ]
机构
[1] Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
[2] College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
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页码:33 / 38
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