High-performance solid-phase crystallized polycrystalline silicon thin-film transistors with floating-channel structure

被引：0
|
作者：
Chang, Chia-Wen [1 ]
Deng, Chih-Kang [1 ]
Chang, Che-Lun [1 ]
Liao, Ta-Chuan [1 ]
Lei, Tan-Fu [1 ]
机构：
[1] Institute of Electronics, National Chiao Tung University, Hsinchu 30010, Taiwan
来源：
Japanese Journal of Applied Physics | 2008年 / 47卷 / 4 PART 2期
关键词：
Channel structures - Crystallization process - Electrical characteristic - Field-effect mobilities - Polycrystalline silicon thin-film transistor - Solid-phase crystallization - Solid-phase-crystallized - Surface nucleation;
D O I：
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学科分类号：
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页码：3024 / 3027
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