Photoluminescence characterization of strained Si-SiGe-on-insulator wafers

被引:0
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作者
Wang, Dong [1 ]
Matsumoto, Koji [2 ]
Nakamae, Masahiko [2 ]
Nakashima, Hiroshi [1 ]
机构
[1] Art, Science and Technology Center for Cooperative Research, Kyushu University, 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, Japan
[2] SUMCO Corporation, 2201 Oaza Kamioda, Kohoku-cho, Kshima-gun, Saga 849-0579, Japan
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页码:3012 / 3016
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