Analysis of impact of bottom electrode position on dynamic pull-in parameters of microcantilevers

被引：0
|
作者：
Shuangkai, Chang [1 ]
Gaofei, Zhang [1 ]
You, Zheng [1 ]
机构：
[1] State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing,100084, China
来源：
Key Engineering Materials | 2015年 / 645卷
关键词：
Compendex;
D O I：
10.4028/www.scientific.net/KEM.645-646.706
中图分类号：
学科分类号：
摘要：
Numerical methods
引用
收藏
页码：706 / 718
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