Analysis of impact of bottom electrode position on dynamic pull-in parameters of microcantilevers

被引：0

作者：

Shuangkai, Chang ^{[1
]}

Gaofei, Zhang ^{[1
]}

You, Zheng ^{[1
]}

机构：

[1] State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing,100084, China

来源：

Key Engineering Materials | 2015年 / 645卷

关键词：

Compendex;

D O I：

10.4028/www.scientific.net/KEM.645-646.706

中图分类号：

学科分类号：

摘要：

Numerical methods

引用

页码：706 / 718

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