Fabrication and resistivity of ZnO:Al thin films prepared by DC magnetron sputtering at room temperature

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作者
Ren, Mingfang [1 ]
Wang, Hua [1 ]
Xu, Jiwen [1 ]
Yang, Ling [1 ]
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[1] Dept. of Information Material Science and Engineering, Guilin University of Electronic Technology, Guilin 541004, China
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页码:344 / 347
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