共 50 条
- [2] ELECTROSTATIC DIAPHRAGM MICROPUMP ELECTRO-FLUID-MECHANICAL SIMULATION COMPUTATIONAL METHODS FOR COUPLED PROBLEMS IN SCIENCE AND ENGINEERING IV, 2011, : 448 - 459
- [5] Membrane deflection under pneumatic and electrostatic actuation without FEM simulation: application to electrostatic micropump MICROSIM II: SIMULATION AND DESIGN OF MICROSYSTEMS AND MICROSTRUCTURES, 1998, : 157 - 166
- [6] Dynamic analysis of an electrostatic micropump 2000 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS, TECHNICAL PROCEEDINGS, 2000, : 632 - 635
- [7] Modeling of a micropump membrane with electrostatic actuator 2ND IEEE INTERNATIONAL CONFERENCE ON ADVANCED COMPUTER CONTROL (ICACC 2010), VOL. 5, 2010, : 630 - 632
- [9] Surface micromachined electrostatic diaphragm micropump ELECTRONICS AND STRUCTURES FOR MEMS, 1999, 3891 : 395 - 402