Surface micromachined electrostatic diaphragm micropump

被引：0
|
作者：
Jang, WI [1 ]
Lee, YI [1 ]
Choi, CA [1 ]
Jun, CH [1 ]
Kim, YT [1 ]
机构：
[1] Elect & Telecommun Res Inst, Basic Telecommun Res Lab, Taejon 305600, South Korea
来源：
ELECTRONICS AND STRUCTURES FOR MEMS | 1999年 / 3891卷
关键词：
surface micromachining; gas-phase etching; electrostatic; micropump;
D O I：
10.1117/12.364469
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An electrostatic diaphragm micropump for fluids and gases has been designed and fabricated by silicon surface micromachining. Diaphragm structures are bridge-type, cantilever-type and fan-type polysilicon, and sacrificial layers are low-temperature oxide (LTO) on polysilicon substrates. The developed anhydrous HF gas-phase etching of sacrificial oxide on polysilicon substrates has been employed to release polysilicon microstructures. The fabricated micropump with size of the order of 1mm(2) operates at square wave voltage of 10V and 2Hz under near room temperature and normal atmospheric pressure.
引用
收藏
页码：395 / 402
页数：8
相关论文
共 50 条
  • [1] Surface micromachined thermally driven micropump
    Jang, WI
    Choi, CA
    Jun, CH
    Kim, YT
    Esashi, M
    SENSORS AND ACTUATORS A-PHYSICAL, 2004, 115 (01) : 151 - 158
  • [2] ELECTROSTATIC DIAPHRAGM MICROPUMP ELECTRO-FLUID-MECHANICAL SIMULATION
    Bertarelli, Emanuele
    Ardito, Raffaele
    Corigliano, Alberto
    COMPUTATIONAL METHODS FOR COUPLED PROBLEMS IN SCIENCE AND ENGINEERING IV, 2011, : 448 - 459
  • [3] Surface-micromachined electrostatic microrelay
    Schiele, I
    Huber, J
    Hillerich, B
    Kozlowski, F
    SENSORS AND ACTUATORS A-PHYSICAL, 1998, 66 (1-3) : 345 - 354
  • [4] A surface micromachined electrostatic drop ejector
    Galambos, P
    Zavadil, K
    Givler, R
    Peter, F
    Gooray, A
    Roller, G
    Crowley, J
    TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2001, : 906 - 909
  • [5] Coupled Electrostatic-Structures-Fluidic Analysis of a Nozzle/Diffuser Diaphragm Micropump
    Dong, JinXin
    Lin, XieZhao
    Ying, Ji
    EQUIPMENT MANUFACTURING TECHNOLOGY AND AUTOMATION, PTS 1-3, 2011, 317-319 : 1609 - +
  • [6] Surface micromachined linear electrostatic stepper motor
    Tas, NR
    Sonnenberg, AH
    Sander, AFM
    Elwenspoek, MC
    MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS, 1997, : 215 - 220
  • [7] A surface micromachined electrostatic ultrasonic air transducer
    Haller, MI
    KhuriYakub, BT
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1996, 43 (01) : 1 - 6
  • [8] A fast switching surface micromachined electrostatic relay
    Thielicke, E
    Obermeier, E
    BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003, : 899 - 902
  • [9] Statistical position repeatability of surface micromachined electrostatic actuators
    Krishnamoorthy, R
    Bifano, T
    Sandri, G
    ETFA '96 - 1996 IEEE CONFERENCE ON EMERGING TECHNOLOGIES AND FACTORY AUTOMATION, PROCEEDINGS, VOLS 1 AND 2, 1996, : 400 - 403
  • [10] Design of an IPMC diaphragm for micropump application
    Nam, Doan Ngoc Chi
    Ahn, Kyoung Kwan
    SENSORS AND ACTUATORS A-PHYSICAL, 2012, 187 : 174 - 182
12345