Dynamic simulation of an electrostatic micropump with pull-in and hysteresis phenomena

被引：44

作者：

Francais, O ^{[1
]}

Dufour, I ^{[1
]}

机构：

[1] Ecole Normale Super, URA CNRS 1375, Lab Elect Signaux & Robot LESIR, F-94235 Cachan, France

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 70卷 / 1-2期

关键词：

micropump; electrostatics; modeling;

D O I：

10.1016/S0924-4247(98)00112-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

After presenting the role of micropumps in medical applications and demonstrating that an electrostatic micropump would seem to be the most appropriate, the geometrical and electrical static characteristics of this pump are summarized. Classical dynamic simulations do not take into account the pull-in effect or the hysteresis phenomenon, both of which appear in electrostatic micropumps. The novel principle of dynamic simulation, which includes these two non-linear characteristics, is then outlined; changes in pressure, volume, how and current are also calculated. The last section displays the advantages associated with this global simulation. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：56 / 60

页数：5

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