Electromagnetic silicon MEMS resonator

被引：0
|
作者：
Watanabe, Yoshiyuki [1 ]
Yahagi, Toru [1 ]
Abe, Yutaka [1 ]
Murayama, Hiroki [1 ]
机构：
[1] Yamagata Research Institute of Technology, Division of Electronics and Information System, Japan
来源：
Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi) | 2019年 / 206卷 / 02期
关键词：
13;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：54 / 60
相关论文
共 50 条
  • [1] Electromagnetic silicon MEMS resonator
    Watanabe, Yoshiyuki
    Yahagi, Toru
    Abe, Yutaka
    Murayama, Hiroki
    ELECTRICAL ENGINEERING IN JAPAN, 2019, 206 (02) : 54 - 60
  • [2] Electromagnetic silicon MEMS resonator
    Watanabe Y.
    Yahagi T.
    Abe Y.
    Murayama H.
    Watanabe, Yoshiyuki (watanabeyoshiy@pref.yamagata.jp), 2018, Institute of Electrical Engineers of Japan (138) : 365 - 369
  • [3] Silicon on nothing MEMS electromechanical resonator
    Cédric Durand
    Fabrice Casset
    Pascal Ancey
    Fabienne Judong
    Alexandre Talbot
    Rémi Quenouillère
    Denis Renaud
    Stéphan Borel
    Brigitte Florin
    Lionel Buchaillot
    Microsystem Technologies, 2008, 14 : 1027 - 1033
  • [4] Silicon on nothing MEMS electromechanical resonator
    Durand, Cedric
    Casset, Fabrice
    Ancey, Pascal
    Judong, Fabienne
    Talbot, Alexandre
    Quenouillere, Remi
    Renaud, Denis
    Borel, Stephan
    Florin, Brigitte
    Buchaillot, Lionel
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2008, 14 (07): : 1027 - 1033
  • [5] Silicon carbide MEMS-resonator-based oscillator
    Young, Darrin J.
    Pehlivanoglu, I. Engin
    Zorman, Christian A.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (11)
  • [6] Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator
    Rodriguez, Janna
    Chandorkar, Saurabh A.
    Watson, Christopher A.
    Glaze, Grant M.
    Ahn, C. H.
    Ng, Eldwin J.
    Yang, Yushi
    Kenny, Thomas W.
    SCIENTIFIC REPORTS, 2019, 9 (1)
  • [7] Mass Sensing using an Amorphous Silicon MEMS resonator
    Patil, S. B.
    Chu, V.
    Conde, J. P.
    PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 2009, 1 (01): : 1063 - 1066
  • [8] Parasitic effect on silicon MEMS resonator model parameters
    Tanaka, Kazuaki
    Kihara, Ryuji
    Sanchez-Amores, Ana
    Montserrat, Josep
    Esteve, Jaume
    MICROELECTRONIC ENGINEERING, 2007, 84 (5-8) : 1363 - 1368
  • [9] Analysis of Frequency Drift of Silicon MEMS Resonator with Temperature
    Jiang, Bo
    Huang, Shenhu
    Zhang, Jing
    Su, Yan
    MICROMACHINES, 2021, 12 (01) : 1 - 10
  • [10] Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator
    Janna Rodriguez
    Saurabh A. Chandorkar
    Christopher A. Watson
    Grant M. Glaze
    C. H. Ahn
    Eldwin J. Ng
    Yushi Yang
    Thomas W. Kenny
    Scientific Reports, 9
12345