Electromagnetic silicon MEMS resonator

被引：0
|
作者：
Watanabe Y. [1 ]
Yahagi T. [1 ]
Abe Y. [1 ]
Murayama H. [1 ]
机构：
[1] Yamagata Research Institute of Technology, 2-2-1, Matsuei, Yamagata-shi, Yamagata
来源：
Watanabe, Yoshiyuki (watanabeyoshiy@pref.yamagata.jp) | 2018年 / Institute of Electrical Engineers of Japan卷 / 138期
关键词：
Electromagnetic drive; Electromotive force detection; MEMS resonator; Multi-modal sensor; Vibration sensing;
D O I：
10.1541/ieejsmas.138.365
中图分类号：
学科分类号：
摘要：
We have fabricated a silicon MEMS resonator aiming at multi-modal sensors, and evaluated vibration characteristics by electromagnetic drive and induced electromotive force detection. The resonance frequency of the driving voltage of 0.6 Vpp shows torsional vibration of approximately 87 kHz, and the resonance frequency is shifted toward the low frequency side as the driving voltage increases. Resonance characteristics due to temperature change and thin film stress were evaluated. © 2018 The Institute of Electrical Engineers of Japan.
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页码：365 / 369
页数：4
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