Electromagnetic silicon MEMS resonator

被引：0
|
作者：
Watanabe, Yoshiyuki [1 ]
Yahagi, Toru [1 ]
Abe, Yutaka [1 ]
Murayama, Hiroki [1 ]
机构：
[1] Yamagata Research Institute of Technology, Division of Electronics and Information System, Japan
来源：
Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi) | 2019年 / 206卷 / 02期
关键词：
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页码：54 / 60
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