Comparison of two types of micromechanical silicon resonant accelerometer structures

被引：0
|
作者：
Huang, Libin [1 ,2 ]
Li, Qingyun [1 ,2 ]
Yang, Hui [1 ,2 ]
Zhao, Liye [1 ,2 ]
机构：
[1] Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China
[2] School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
来源：
Sensors and Transducers | 2013年 / 161卷 / 12期
关键词：
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页码：554 / 561
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