Comparison of two types of micromechanical silicon resonant accelerometer structures

被引：0
|
作者：
Huang, Libin [1 ,2 ]
Li, Qingyun [1 ,2 ]
Yang, Hui [1 ,2 ]
Zhao, Liye [1 ,2 ]
机构：
[1] Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China
[2] School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
来源：
Sensors and Transducers | 2013年 / 161卷 / 12期
关键词：
16;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：554 / 561
相关论文
共 50 条
  • [21] Folded silicon resonant accelerometer with temperature compensation
    He, L
    Xu, YP
    Qiu, AP
    PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3, 2004, : 512 - 515
  • [22] Energy method for the optimization of a silicon resonant accelerometer
    Zhang, Jing
    Shi, Qin
    Su, Yan
    Qiu, An-Ping
    2016 IEEE INTERNATIONAL INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE PROCEEDINGS, 2016, : 297 - 302
  • [23] Temperature effect and compensation of silicon resonant accelerometer
    Dong, J.-H. (dongjinhu0907@163.com), 1600, Tianjin University (10):
  • [24] A NEW BIAXIAL SILICON RESONANT MICRO ACCELEROMETER
    Comi, C.
    Corigliano, A.
    Langfelder, G.
    Longoni, A.
    Tocchio, A.
    Simoni, B.
    2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, : 529 - 532
  • [25] Bulk-Micromachined Silicon Resonant Accelerometer
    Qiu, Anping
    Su, Yan
    Zhu, Xinhua
    Shi, Qin
    ICIA: 2009 INTERNATIONAL CONFERENCE ON INFORMATION AND AUTOMATION, VOLS 1-3, 2009, : 1264 - 1267
  • [26] Design and simulation of a multi-finger micromechanical silicon accelerometer
    Dong, JX
    Qin, JH
    MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY AND DEVICES, 2001, 4601 : 293 - 297
  • [27] RESONANT SILICON STRUCTURES
    BUSER, RA
    DEROOIJ, NF
    SENSORS AND ACTUATORS, 1989, 17 (1-2): : 145 - 154
  • [28] Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer
    Liu, Heng
    Zhang, Yu
    Wu, Jiale
    MICROMACHINES, 2022, 13 (08)
  • [29] Micro Leverage Modeling, Simulation and Optimization for Micromechanical Silicon Oscillating Accelerometer
    Jiang, Shao Dong
    Shi, Ran
    Qiu, An Ping
    Su, Yan
    MANUFACTURING PROCESS TECHNOLOGY, PTS 1-5, 2011, 189-193 : 4130 - 4134
  • [30] A Novel Resonant Accelerometer Based on Quartz on Silicon (QoS)
    Han, Chao
    Zhao, Yulong
    Li, Cun
    2019 6TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS & SYSTEMS (INERTIAL 2019), 2019,
12345