Reverse Gate Leakage Induced Buffer Charging and Threshold Voltage Shift of GaN HEMTs

被引:0
|
作者
Yu, Hao [1 ]
Yadav, Sachin [1 ]
O'Sullivan, Barry [1 ]
Lin, Tzu-Heng [1 ,2 ]
Rathi, Aarti [1 ]
Alian, Alireza [1 ]
Wu, Tian-Li [1 ,2 ,3 ]
Elkashlan, Rana [1 ]
Banerjee, Sourish [1 ]
Peralagu, Uthayasankaran [1 ]
Parvais, Bertrand [1 ,4 ]
Collaert, Nadine [1 ,4 ]
机构
[1] imec, B-3001 Leuven, Belgium
[2] Natl Yang Ming Chiao Tung Univ, Int Coll Semicond Technol, Hsinchu 30010, Taiwan
[3] Natl Yang Ming Chiao Tung Univ, Inst Elect, Hsinchu 30010, Taiwan
[4] Vrije Univ Brussel, Dept ETRO, B-1050 Brussels, Belgium
关键词
MODFETs; HEMTs; Logic gates; Stress; Wide band gap semiconductors; Metals; Electrons; Aluminum gallium nitride; Radio frequency; Potential energy; Co-deposited TiSi; contact resistivity; highly doped silicon; oxygen-gettering metal; titanium alloys;
D O I
10.1109/TED.2024.3473892
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We discuss a physical mechanism in the AlGaN/GaN high electron mobility transistors (HEMTs) that partial electrons from reverse gate leakage (I g,off ) inject into the HEMT buffer and thereby shift the HEMT threshold voltage (Delta V-th). We analyze the A V th dependences on parameters including gate lengths, front barrier (FB) thickness, gate bias voltage, drain bias voltage, and the distance between the gate and the buffer. We specifically investigate the OFF-state stress with nonzero and zero Vds. The experiment with zero V ds helps identify the I (g,off) induced C doped GaN (C-GaN) charging; while the one nonzero V ds indicates a fast increase of C-GaN charging induced A V th with V-ds.. The A V th issue is significant for downscaled HEMTs with a short gate length and a close distance between the gate and the buffer. The issue is thus critical for downscaled HEMTs in high-speed RF applications. We propose a simple analytical expression for the A V- th and demonstrate methods to reduce the A V (th) .
引用
收藏
页码:7308 / 7313
页数:6
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