Advanced millisecond annealing technologies and its applications and concerns on advanced logic LSI fabrication processes

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作者：
Fujitsu Limited, 50, Fuchigami, Akiruno, Tokyo, 197-0833, Japan [1 ]
不详 [2 ]
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来源：
Mater Sci Forum | 2008年 / 325-332期
关键词：
Annealing;
D O I：
10.4028/www.scientific.net/msf.573-574.325
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