Properties of ZnO:Al thin films deposited by co-sputtering with Zn target and Al-doped ZnO target

被引：0
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作者：
Zhao, Lian-Bo [1 ]
Liu, Fang-Yang [1 ]
Zou, Zhong [1 ]
Zhang, Zhi-An [1 ]
Ouyang, Zi-Dian [1 ]
Lai, Yan-Qing [1 ]
Li, Jie [1 ]
Liu, Ye-Xiang [1 ]
机构：
[1] School of Metallurgical Science and Engineering, Central South University, Changsha 410083, China
来源：
Zhongguo Youse Jinshu Xuebao/Chinese Journal of Nonferrous Metals | 2012年 / 22卷 / 04期
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页码：1119 / 1125
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