Three-dimensional morphology evolution of SiO2 patterned films under MeV ion irradiation

被引：0
|
作者：
Otani, Kan [1 ]
Chen, Xi [2 ]
Hutchinson, John W. [1 ]
Chervinsky, John F. [1 ]
Aziz, Michael J. [1 ]
机构：
[1] Division of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138
[2] Department of Civil Engineering and Engineering Mechanics, Columbia University, New York, NY 10027
来源：
Journal of Applied Physics | 2006年 / 100卷 / 02期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
相关论文
共 50 条
  • [31] Charging effects of SiO2 thin films under defocused electron beam irradiation
    Li Wei-Qin
    Zhang Hai-Bo
    Lu Jun
    ACTA PHYSICA SINICA, 2012, 61 (02)
  • [32] Evolution of microstructure and crack pattern in NiO thin films under 200 MeV Au ion irradiation
    Mallick, P.
    Agarwal, D. C.
    Rath, Chandana
    Behera, D.
    Avasthi, D. K.
    Kanjilal, D.
    Mishra, N. C.
    RADIATION PHYSICS AND CHEMISTRY, 2012, 81 (06) : 647 - 651
  • [33] Effects of MeV Si ions bombardment on the thermoelectric generator from SiO2/SiO2 + Cu and SiO2/SiO2 + Au nanolayered multilayer films
    Budak, S.
    Chacha, J.
    Smith, C.
    Pugh, M.
    Colon, T.
    Heidary, K.
    Johnson, R. B.
    Ila, D.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2011, 269 (24): : 3204 - 3208
  • [34] Formation of DLC films by three-dimensional ion implantation under high vacuum
    Tamba, Moritake
    Saitou, Takahiro
    Ikegami, Yuji
    Suzuki, Yoshiaki
    Kobayashi, Tomohiro
    Tokuchi, Akira
    Katayama, Takeshi
    ELECTRICAL ENGINEERING IN JAPAN, 2007, 158 (03) : 1 - 11
  • [35] Evolution of morphology in nanocrystalline thin films during ion irradiation
    Mayr, SG
    Averback, RS
    PHYSICAL REVIEW B, 2003, 68 (07)
  • [36] Three-dimensional islands of Si and Ce formed on SiO2 through crystallization and agglomeration from amorphous thin films
    Wakayama, Y
    Tagami, T
    Tanaka, S
    THIN SOLID FILMS, 1999, 350 (1-2) : 300 - 307
  • [37] Evolvability and constraint in the evolution of three-dimensional flower morphology
    Opedal, Oystein H.
    Hildesheim, Laura S.
    Armbruster, W. Scott
    AMERICAN JOURNAL OF BOTANY, 2022, 109 (11) : 1906 - 1917
  • [38] Dewetting and nanopattern formation of thin Pt films on SiO2 induced by ion beam irradiation
    Hu, XY
    Cahill, DG
    Averback, RS
    JOURNAL OF APPLIED PHYSICS, 2001, 89 (12) : 7777 - 7783
  • [39] Stability of GaN films under intense MeV He ion irradiation
    Schwarz, R.
    Cabeca, R.
    Morgado, E.
    Niehus, M.
    Ambacher, O.
    Marques, C. P.
    Alves, E.
    DIAMOND AND RELATED MATERIALS, 2007, 16 (4-7) : 1437 - 1440
  • [40] Quantitative estimation of generation rates of Si/SiO2 interface defects by MeV He single ion irradiation
    WASEDA Univ, Tokyo, Japan
    IEEE Trans Nucl Sci, 6 Pt 1 (2952-2959):
12345