Application of perfect 2 DOF PDD2 control with flow disturbance observer for pneumatic stage

被引：0
|
作者：
Yanagawa A. [1 ]
Wakui S. [1 ]
机构：
[1] Department of Electrical and Electronic Engineering, Tokyo University of Agriculture and Technology, Koganei-shi, Tokyo, 184-8588
来源：
Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C | 2010年 / 76卷 / 766期
关键词：
Flow disturbance; Pdd[!sup]2[!/sup] control; Perfect 2 d.o.f. Pdd[!sup]2[!/sup] control; Pi compensator; Pneumatic stage;
D O I：
10.1299/kikaic.76.1496
中图分类号：
学科分类号：
摘要：
In the field of positioning control, magnetic actuators such as linear motors have been widely used. However it cannot be used for electron beam exposure apparatus due to the magnetic leak and heat generation. Therefore, positioning control with air pressure actuators is proposed instead of magnetic actuators. The problem of using air pressure actuators is an inactive response with air's compressibility. Therefore, this paper presents the positioning control methods of PDD2 control, on the condition that servo valve including air system is imperfect integrator, and the speeding of positioning control with perfect 2 d.o.f. control. However, repeatability cannot be conformed due to flow and mechanical disturbances. Therefore, this paper also presents a compensation method of flow disturbance named flow disturbance observer and perfect 2 d.o.f. PDD2 control with flow disturbance to improve the response of target value. Finally, the repeatability of perfect 2 d.o.f. PDD2 control with flow disturbance is presented.
引用
收藏
页码：1496 / 1502
页数：6
相关论文
共 50 条
  • [21] Interval Type-2 Fuzzy Disturbance Observer-Based T-S Fuzzy Control for a Pneumatic Flexible Joint
    Chen, Cheng
    Huang, Jian
    Wu, Dongrui
    Tu, Xikai
    IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2022, 69 (06) : 5962 - 5972
  • [22] Behaviour of 2DOF Controller in the Closed-loop Control with Pneumatic Actuator
    Sladka, Karla
    Mahdal, Miroslav
    2017 18TH INTERNATIONAL CARPATHIAN CONTROL CONFERENCE (ICCC), 2017, : 359 - 362
  • [23] Control of a 2-DOF ultrasonic piezomotor stage for grommet insertion
    Liang, Wenyu
    Tan, Kok Kiong
    Huang, Sunan
    Le Phoung Pham
    Lim, Hsueh Yee
    Gan, Chee Wee
    MECHATRONICS, 2013, 23 (08) : 1005 - 1013
  • [24] Observer-Based Sliding Mode Control of a 2-DOF Helicopter System
    Lambert, Peter
    Reyhanoglu, Mahmut
    IECON 2018 - 44TH ANNUAL CONFERENCE OF THE IEEE INDUSTRIAL ELECTRONICS SOCIETY, 2018, : 2596 - 2600
  • [25] Application of adaptive control to 2DOF helicopter model
    Bejar, M.
    Raimundez, C.
    REVISTA IBEROAMERICANA DE AUTOMATICA E INFORMATICA INDUSTRIAL, 2007, 4 (01): : 35 - +
  • [26] L2 filtered backstepping control based on nonlinear disturbance observer
    Song, Wenlong, 1600, Central South University of Technology (45):
  • [27] Active Disturbance Rejection Control of a 2DOF manipulator with significant modeling uncertainty
    Przybyla, M.
    Kordasz, M.
    Madonski, R.
    Herman, P.
    Sauer, P.
    BULLETIN OF THE POLISH ACADEMY OF SCIENCES-TECHNICAL SCIENCES, 2012, 60 (03) : 509 - 520
  • [28] Disturbance observer and feedforward design for a 2-DOF high-speed/high-accuracy robotic system
    Cui, J
    Chu, ZY
    ICMIT 2005: CONTROL SYSTEMS AND ROBOTICS, PTS 1 AND 2, 2005, 6042
  • [29] Observer-based Adaptive Super Twisting Control Strategy for a 2-DOF Helicopter
    Salas, Oscar
    Castaneda, Herman
    DeLeon-Morales, Jesus
    2013 INTERNATIONAL CONFERENCE ON UNMANNED AIRCRAFT SYSTEMS (ICUAS), 2013, : 1061 - 1070
  • [30] Robust 2DOF control for periodic reference signal and disturbance signal in piston machining
    Zhao, Ximei
    Guo, Qingding
    Diangong Jishu Xuebao/Transactions of China Electrotechnical Society, 2006, 21 (03): : 123 - 126
12345