Latest progress of plasma immersion ion implantation and deposition and its applications

被引：0
|
作者：
Ren, Ying [1 ]
Zhang, Guifeng [1 ]
Dong, Chuang [1 ]
Jiang, Xin [1 ]
机构：
[1] State Key Laboratory of Materials Modification by Electron, Ion and Laser Beams, School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2009年 / 29卷 / 03期
关键词：
32;
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页码：255 / 263
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