Plasma-immersion ion implantation

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作者：
Thomae, Rainer W. [1 ]
机构：
[1] Johan Wolfgang Goethe-Universitaet, Frankfurt am Main, Germany
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1998年 / 139卷 / 1-4期
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页码：37 / 42
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