共 50 条
- [31] Capacitive Silicon micro-Accelerometer's Noise Reduction Technology Research ICICTA: 2009 SECOND INTERNATIONAL CONFERENCE ON INTELLIGENT COMPUTATION TECHNOLOGY AND AUTOMATION, VOL I, PROCEEDINGS, 2009, : 553 - 556
- [32] Micro Leverage Modeling, Simulation and Optimization for Micromechanical Silicon Oscillating Accelerometer MANUFACTURING PROCESS TECHNOLOGY, PTS 1-5, 2011, 189-193 : 4130 - 4134
- [33] A Novel Resonant Accelerometer Based on Quartz on Silicon (QoS) 2019 6TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS & SYSTEMS (INERTIAL 2019), 2019,
- [34] Parameter optimization of drive circuit in silicon resonant accelerometer Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014, 22 (06): : 1500 - 1506
- [35] An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer SENSORS, 2009, 9 (03): : 1330 - 1338
- [36] A New Silicon Triaxial Resonant Micro-accelerometer 2014 INTERNATIONAL CONFERENCE ON INFORMATION SCIENCE, ELECTRONICS AND ELECTRICAL ENGINEERING (ISEEE), VOLS 1-3, 2014, : 1282 - +
- [37] Silicon micromachined resonant accelerometer based on ZnO nanowire Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2009, 17 (06): : 1279 - 1285
- [38] Research on temperature compensation method of silicon resonant accelerometer based on integrated temperature measurement resonator PROCEEDINGS OF 2015 IEEE 12TH INTERNATIONAL CONFERENCE ON ELECTRONIC MEASUREMENT & INSTRUMENTS (ICEMI), VOL. 3, 2015, : 1577 - 1581
- [40] SOLDER MODELING FOR SURFACE MOUNTING TECHNOLOGY GEC JOURNAL OF RESEARCH, 1988, 6 (01): : 16 - 24