Research on surface mounting technology of micromechanical silicon resonant accelerometer

被引：0
|
作者：
机构：
[1] Huang, Libin
[2] Gao, Yang
来源：
Huang, L. (huanglibin@seu.edu.cn) | 1600年 / Universitas Ahmad Dahlan卷 / 11期
关键词：
18;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] Silicon Resonant Micro Pressure Sensor and Micro Resonant Accelerometer
    Shi, Xin
    Guan, Zhengzheng
    Wu, Hua
    ADVANCES IN CHEMICAL ENGINEERING II, PTS 1-4, 2012, 550-553 : 3376 - +
  • [22] Folded silicon resonant accelerometer with temperature compensation
    He, L
    Xu, YP
    Qiu, AP
    PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3, 2004, : 512 - 515
  • [23] Energy method for the optimization of a silicon resonant accelerometer
    Zhang, Jing
    Shi, Qin
    Su, Yan
    Qiu, An-Ping
    2016 IEEE INTERNATIONAL INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE PROCEEDINGS, 2016, : 297 - 302
  • [24] Temperature effect and compensation of silicon resonant accelerometer
    Dong, J.-H. (dongjinhu0907@163.com), 1600, Tianjin University (10):
  • [25] A NEW BIAXIAL SILICON RESONANT MICRO ACCELEROMETER
    Comi, C.
    Corigliano, A.
    Langfelder, G.
    Longoni, A.
    Tocchio, A.
    Simoni, B.
    2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, : 529 - 532
  • [26] Bulk-Micromachined Silicon Resonant Accelerometer
    Qiu, Anping
    Su, Yan
    Zhu, Xinhua
    Shi, Qin
    ICIA: 2009 INTERNATIONAL CONFERENCE ON INFORMATION AND AUTOMATION, VOLS 1-3, 2009, : 1264 - 1267
  • [27] Design and simulation of a multi-finger micromechanical silicon accelerometer
    Dong, JX
    Qin, JH
    MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY AND DEVICES, 2001, 4601 : 293 - 297
  • [28] Surface-micromachined resonant accelerometer
    Roessig, TA
    Howe, RT
    Pisano, AP
    Smith, JH
    TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1997, : 859 - 862
  • [29] Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer
    Liu, Heng
    Zhang, Yu
    Wu, Jiale
    MICROMACHINES, 2022, 13 (08)
  • [30] APPLICATION OF SILICON MICROMECHANICAL TECHNOLOGY TO SENSORS
    PETERSEN, KE
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (08) : C321 - C321
12345