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- [4] Implementation and experiments of micromechanical differential silicon resonant accelerometer Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2010, 18 (12): : 2583 - 2589
- [5] Temperature Self-Compensation of Micromechanical Silicon Resonant Accelerometer MECHATRONICS, ROBOTICS AND AUTOMATION, PTS 1-3, 2013, 373-375 : 373 - 381
- [6] Comparison of two types of micromechanical silicon resonant accelerometer structures Sensors and Transducers, 2013, 161 (12): : 554 - 561
- [7] Design of Temperature Sensitive Structure for Micromechanical Silicon Resonant Accelerometer 2017 INTERNATIONAL CONFERENCE ON COMPUTER NETWORK, ELECTRONIC AND AUTOMATION (ICCNEA), 2017, : 350 - 354
- [8] Study on Packaging Thermal Stress of Micromechanical Silicon Resonant Accelerometer SENSORS, MEASUREMENT AND INTELLIGENT MATERIALS, PTS 1-4, 2013, 303-306 : 155 - +
- [9] Design and Simulation of a Micromechanical Silicon Resonant Accelerometer with Low Temperature Sensitivity 2018 EIGHTH INTERNATIONAL CONFERENCE ON INSTRUMENTATION AND MEASUREMENT, COMPUTER, COMMUNICATION AND CONTROL (IMCCC 2018), 2018, : 162 - 167
- [10] High-precision frequency output circuit for silicon micromechanical resonant accelerometer Zhongguo Guanxing Jishu Xuebao/Journal of Chinese Inertial Technology, 2014, 22 (06): : 820 - 824