An investigation on hot-carrier reliability and degradation index in lateral diffused metal-oxide-semiconductor field-effect transistors

被引:0
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作者
Tian, Kuen-Shiuan [1 ]
Chen, Jone F. [1 ]
Chen, Shiang-Yu [1 ]
Wu, Kuo-Ming [2 ]
Lee, J.R. [1 ]
Huang, Tsung-Yi [2 ]
Liu, C.M. [2 ]
Hsu, S.L. [2 ]
机构
[1] Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan 701, Taiwan
[2] Taiwan Semiconductor Manufacturing Company, Hsinchu 300, Taiwan
来源
Japanese Journal of Applied Physics | 2008年 / 47卷 / 4 PART 2期
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页码:2641 / 2644
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