Micromachining of ridge optical waveguides on top of He+ -implanted Β-BaB2O4 crystals by femtosecond laser ablation

被引：0
|
作者：
Degl'innocenti, R. [1 ]
Reidt, S. [1 ]
Guarino, A. [1 ]
Rezzonico, D. [1 ]
Poberaj, G. [1 ]
Günter, P. [1 ]
机构：
[1] Nonlinear Optics Laboratory, Institute of Quantum Electronics, ETH Zurich, CH-8093 Zurich, Switzerland
来源：
Journal of Applied Physics | 2006年 / 100卷 / 11期
关键词：
We report on a technique for the fabrication of ridge optical waveguides on top of Β- BaB2 O4 (BBO) crystals. The BBO crystals were first implanted by He+ ions to form planar optical waveguides. In the second step; the femtosecond laser ablation technique was employed for micromachining of ridge-type optical waveguides. A thorough study of material-specific ablation parameters for BBO has been performed in order to achieve ablated structures with smooth sidewalls. A further process of Ar+ ion smoothing in a plasma chamber was used to reduce the sidewall roughness of the ablated ridges from 75 to 35 nm root mean square. We demonstrated optical waveguiding in these femtosecond-ablated plasma-treated waveguides and measured total propagation losses of less than 10 dBcm at 532 nm; making them suitable for nonlinear- and electro-optical applications. © 2006 American Institute of Physics;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
相关论文
共 50 条
  • [31] Observation of paramagnetic point defects in BBO (β-BaB2O4) crystals
    Hong, W
    Halliburton, LE
    Perlov, D
    Stevens, KT
    Route, RK
    Feigelson, RS
    OPTICAL MATERIALS, 2004, 26 (04) : 437 - 441
  • [32] Thermal Conductivity and Heat Capacity of α- and β-BaB2O4 Single Crystals
    Popov, P. A.
    Moiseev, N. V.
    Kokh, A. E.
    Kokh, K. A.
    INORGANIC MATERIALS, 2011, 47 (02) : 163 - 166
  • [33] Anisotropy of piezo- and elastooptical effect in β-BaB2O4 crystals
    Andrushchak, AS
    Adamiv, VT
    Kruphych, OM
    Martynyuk-Lototska, IY
    Burak, YV
    Vlokh, RO
    FERROELECTRICS, 2000, 238 (1-4) : 299 - 305
  • [34] EFFECT OF PHASE-COMPOSITION ON THERMOLUMINESCENCE IN BAB2O4 CRYSTALS
    LYUBETSKY, SL
    BARYSHEV, SA
    GERKEN, VA
    ERMAKOV, GA
    OPTIKA I SPEKTROSKOPIYA, 1992, 72 (04): : 905 - 907
  • [35] Spatial anisotropy of photoelastic and acoustooptic properties in β-BaB2O4 crystals
    Andrushchak, AS
    Bobitski, Y
    Kaidan, MV
    Tybinka, BV
    Kityk, A
    Schranz, W
    OPTICAL MATERIALS, 2004, 27 (03) : 619 - 624
  • [36] Power- and polarization-dependent supercontinuum generation in α-BaB2O4 crystals by intense, near-infrared, femtosecond laser pulses
    Vasa, Parinda
    Dota, Krithika
    Singh, Mamraj
    Kushavah, Dushyant
    Singh, Bhanu P.
    Mathur, Deepak
    PHYSICAL REVIEW A, 2015, 91 (05):
  • [37] Growth of α-BaB2O4 single crystals from melts at various compositions:: comparison of optical properties
    Solntsev, VP
    Tsvetkov, EG
    Gets, VA
    Antsygin, VD
    JOURNAL OF CRYSTAL GROWTH, 2002, 236 (1-3) : 290 - 296
  • [38] Morphology and orientation of β-BaB2O4 crystals patterned by laser in the inside of samarium barium borate glass
    Nishii, Akihito
    Shinozaki, Kenji
    Honma, Tsuyoshi
    Komatsu, Takayuki
    JOURNAL OF SOLID STATE CHEMISTRY, 2015, 221 : 145 - 151
  • [39] Growth, optical transmission and X-ray photoemission studies of BaB2O4 single crystals
    S. C. Sabharwal
    Madhumita Sangeeta
    S. K. Goswami
    B. D. Kulkarni
    Journal of Materials Science: Materials in Electronics, 2000, 11 : 325 - 329
  • [40] Growth, optical transmission and X-ray photoemission studies of BaB2O4 single crystals
    Sabharwal, SC
    Sangeeta
    Goswami, M
    Kulkarni, SK
    Padalia, BD
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2000, 11 (04) : 325 - 329
12345