Micromachining of ridge optical waveguides on top of He+ -implanted Β-BaB2O4 crystals by femtosecond laser ablation

被引：0
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作者：
Degl'innocenti, R. [1 ]
Reidt, S. [1 ]
Guarino, A. [1 ]
Rezzonico, D. [1 ]
Poberaj, G. [1 ]
Günter, P. [1 ]
机构：
[1] Nonlinear Optics Laboratory, Institute of Quantum Electronics, ETH Zurich, CH-8093 Zurich, Switzerland
来源：
Journal of Applied Physics | 2006年 / 100卷 / 11期
关键词：
We report on a technique for the fabrication of ridge optical waveguides on top of Β- BaB2 O4 (BBO) crystals. The BBO crystals were first implanted by He+ ions to form planar optical waveguides. In the second step; the femtosecond laser ablation technique was employed for micromachining of ridge-type optical waveguides. A thorough study of material-specific ablation parameters for BBO has been performed in order to achieve ablated structures with smooth sidewalls. A further process of Ar+ ion smoothing in a plasma chamber was used to reduce the sidewall roughness of the ablated ridges from 75 to 35 nm root mean square. We demonstrated optical waveguiding in these femtosecond-ablated plasma-treated waveguides and measured total propagation losses of less than 10 dBcm at 532 nm; making them suitable for nonlinear- and electro-optical applications. © 2006 American Institute of Physics;
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